发明公开
EP1544927A3 Piezoelectric element, fabrication method for the same, and inkjet head, inkjet recording apparatus and angular velocity sensor including the same
有权
一种压电元件，其制造方法，以及喷墨头，喷墨记录装置和角速度传感器具有相同的
- 专利标题： Piezoelectric element, fabrication method for the same, and inkjet head, inkjet recording apparatus and angular velocity sensor including the same
- 专利标题（中）： 一种压电元件，其制造方法，以及喷墨头，喷墨记录装置和角速度传感器具有相同的
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申请号： EP04014142.6申请日： 2004-06-16
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公开(公告)号： EP1544927A3公开(公告)日： 2008-07-09
- 发明人: Torii, Hideo , Fujii, Eiji , Kamada, Takeshi , Fujii, Satoru
- 申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 申请人地址： 1006, Oaza-Kadoma Kadoma-shi, Osaka 571-8501 JP
- 专利权人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 当前专利权人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 当前专利权人地址： 1006, Oaza-Kadoma Kadoma-shi, Osaka 571-8501 JP
- 代理机构： Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
- 优先权： JP2003418321 20031216; JP2004127087 20040422
- 主分类号： H01L41/18
- IPC分类号： H01L41/18 ; H01L41/22 ; H01L41/09 ; B41J2/14 ; G01C19/56
摘要：
A piezoelectric element includes a first electrode (2); a piezoelectric layered film (10) composed of a first piezoelectric film (3) formed on the first electrode film and a second piezoelectric film (4) that is formed on the first piezoelectric film and is controlled in crystal orientation thereof by the first piezoelectric film; and a second electrode film (5) formed on the second piezoelectric film. Each of the first and second piezoelectric films is an aggregate of columnar grains grown unidirectionally along a thickness direction of the piezoelectric layered film. A columnar grain of the second piezoelectric film has a larger cross-sectional diameter than a columnar grain of the first piezoelectric film. A ratio l/d of the thickness l of the piezoelectric layered film to the cross-sectional diameter d of the second piezoelectric film is not less than 20 and not more than 60.
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