发明公开
EP1549920A2 VORRICHTUNG ZUR TESTBESTRAHLUNG VON MIT PHOTOEMPFINDLICHEN LACKEN BESCHICHTETEN OBJEKTEN
审中-公开
设备辐射与光敏涂料中的被覆物品TEST
- 专利标题: VORRICHTUNG ZUR TESTBESTRAHLUNG VON MIT PHOTOEMPFINDLICHEN LACKEN BESCHICHTETEN OBJEKTEN
- 专利标题(英): Irradiation device for testing objects coated with light-sensitive paint
- 专利标题(中): 设备辐射与光敏涂料中的被覆物品TEST
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申请号: EP03808674.0申请日: 2003-10-08
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公开(公告)号: EP1549920A2公开(公告)日: 2005-07-06
- 发明人: DOMKE, Wolf-Dieter , JUSCHKIN, Larissa , KRAGLER, Karl , LEBERT, Rainer , MEISEN, Manfred
- 申请人: Infineon Technologies AG , Aixuv GmbH
- 申请人地址: St.-Martin-Strasse 53 81669 München DE
- 专利权人: Infineon Technologies AG,Aixuv GmbH
- 当前专利权人: Infineon Technologies AG,Aixuv GmbH
- 当前专利权人地址: St.-Martin-Strasse 53 81669 München DE
- 代理机构: Gross, Felix, Dr.
- 优先权: DE10247626 20021011; DE10305573 20030210
- 国际公布: WO2004036312 20040429
- 主分类号: G01J1/42
- IPC分类号: G01J1/42
摘要:
The invention concerns an irradiation device for testing objects coated with light-sensitive paint, comprising a EUV radiation source, an optical system for filtering the radiation of the EUV radiation source, a chamber for receiving the object, as well as systems for intersecting the trajectory of the rays on the object. The invention also concerns a method for operating such a device. The invention aims at obtaining as quickly as possible an illumination at least partly simultaneous of several irradiation fields, with different doses, by using an inexpensive laboratory radiation source without resorting to complex optical systems. Therefor, the invention provides a device comprising a simplified and compact optical system, with closable diaphragm apertures located in front of the object to be irradiated and at least one control sensor placed on the trajectory of the rays and enabling the radiation dose to be measured.
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