发明公开
EP1562229A2 Method for manufacturing metal structures having different heights
审中-公开
用于制造具有不同高度的金属结构的方法
- 专利标题: Method for manufacturing metal structures having different heights
- 专利标题(中): 用于制造具有不同高度的金属结构的方法
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申请号: EP04256510.1申请日: 2004-10-22
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公开(公告)号: EP1562229A2公开(公告)日: 2005-08-10
- 发明人: Shim, Dong-sik , Choi, Hyung , Jun, Chan-bong , Song, Hoon
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: 416 Maetan-dong, Yeongtong-gu Suwon-si, Gyeonggi-do 442-742 KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: 416 Maetan-dong, Yeongtong-gu Suwon-si, Gyeonggi-do 442-742 KR
- 代理机构: Ertl, Nicholas Justin
- 优先权: KR2003092620 20031217
- 主分类号: H01L21/768
- IPC分类号: H01L21/768
摘要:
Disclosed is a method for forming a plurality of metal structures having different heights on a semiconductor substrate. The disclosed method for manufacturing a metal structure having different heights includes: forming a plurality of seed layers (20'a,20'b,20c), to have heights corresponding to the metal structure to be formed, on a semiconductor substrate so that those layers can be electrically separated, performing a plating process using a plating mold, and applying different currents to the respective seed layers so that the plating thickness can be adjusted for each of the seed layers. Accordingly, a plurality of metal structures having different heights can be obtained by a plating mold forming process and a plating process that are performed just once, respectively.
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