发明公开
- 专利标题: Vacuum pumping system
- 专利标题(中): 真空系统
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申请号: EP04425172.6申请日: 2004-03-15
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公开(公告)号: EP1577559A1公开(公告)日: 2005-09-21
- 发明人: Maccarrone, Cristian , Titolo, Massimiliano
- 申请人: VARIAN S.p.A.
- 申请人地址: Via Varian 54 10040 Leini' (Torino) IT
- 专利权人: VARIAN S.p.A.
- 当前专利权人: VARIAN S.p.A.
- 当前专利权人地址: Via Varian 54 10040 Leini' (Torino) IT
- 代理机构: Robba, Pierpaolo
- 主分类号: F04C29/10
- IPC分类号: F04C29/10 ; F04B49/06
摘要:
The present invention concerns a vacuum pumping system (1) comprising at least one vacuum pumping device (11; 31), including a vacuum pump (13; 33) and a local electronic control unit (15; 35) for monitoring and controlling the operating parameters of said pump, and a control station (51), remotely located relative to said at least one pumping device (11; 31) and equipped with a corresponding remote control unit (53); wherein said remote control unit (53) and said local control unit (15; 35) are equipped with wireless communication modules (27, 55; 47, 55) for communicating data and commands for controlling the operation of said at least one vacuum pumping device.
公开/授权文献
- EP1577559B2 Vacuum pumping system 公开/授权日:2016-11-16
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