发明公开
EP1581375A1 FLEXIBLE MOLD, METHOD OF MANUFACTURING SAME AND METHOD OF MANUFACTURING FINE STRUCTURES 审中-公开
柔性模具,制作方法及其精细结构研究方法

FLEXIBLE MOLD, METHOD OF MANUFACTURING SAME AND METHOD OF MANUFACTURING FINE STRUCTURES
摘要:
A flexible mold (10) having a mold layer (11) that is provided on the surface thereof with a groove pattern (4) of specified shape and size, is constructed such that the mold layer contains a lithium salt of an organic fluorine compound as an antistatic agent.
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