发明公开
- 专利标题: CENTRIFUGAL SINTERING SYSTEM
- 专利标题(中): ZENTRIFUGALSINTERSYSTEM
-
申请号: EP03786315申请日: 2003-12-25
-
公开(公告)号: EP1595624A4公开(公告)日: 2007-05-16
- 发明人: WATARI KOJI , KINEMUCHI YOSHIAKI , UCHIMURA SHOJI , ISHIGURO HIROHIDE , MORIMITSU HIDEKI
- 申请人: NAT INST OF ADVANCED IND SCIEN , SINTO V CERAX LTD
- 专利权人: NAT INST OF ADVANCED IND SCIEN,SINTO V CERAX LTD
- 当前专利权人: NAT INST OF ADVANCED IND SCIEN,SINTO V CERAX LTD
- 优先权: JP2002382579 2002-12-27
- 主分类号: C04B35/64
- IPC分类号: C04B35/64 ; B22F3/00 ; C04B35/10 ; C04B35/48 ; C04B35/575 ; F27B17/00 ; H01L21/687 ; B22F3/06
摘要:
A centrifugal sintering system imparting a centrifugal force field and a temperature field to a molding of ceramics or metal powder or a ceramic precursor film, characterized in that a rotor for turning a sample holder, a shaft or the sample holder used in the centrifugal sintering system is composed of ceramics. The ceramic member and the rotor for turning the sample holder are composed of conductive silicon carbide ceramics and a sample is heated indirectly by self heating only the rotor selectively using an induction heating means. The ceramics member and the sample holder are composed of a material having a large dielectric loss, and the sample is heated indirectly by heating only the sample holder selectively using a dielectric heating means.
信息查询
IPC分类: