发明授权
- 专利标题: CAPACITIVE ACCELERATION SENSOR
- 专利标题(中): 电容式加速度传感器
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申请号: EP04710048.2申请日: 2004-02-11
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公开(公告)号: EP1599736B1公开(公告)日: 2018-04-04
- 发明人: KUISMA, Heikki , LAHDENPERÄ, Juha , MUTIKAINEN, Risto
- 申请人: Murata Electronics Oy
- 申请人地址: Myllynkivenkuja 6 01620 Vantaa FI
- 专利权人: Murata Electronics Oy
- 当前专利权人: Murata Electronics Oy
- 当前专利权人地址: Myllynkivenkuja 6 01620 Vantaa FI
- 代理机构: Boco IP Oy Ab
- 优先权: FI20030338 20030305
- 国际公布: WO2004079373 20040916
- 主分类号: G01P15/08
- IPC分类号: G01P15/08 ; G01P15/125 ; B81B7/00
摘要:
The invention relates to measuring devices used for the measuring of acceleration, and specifically to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention comprises a pair of electrodes composed of a movable electrode ( 4 ) and a stationary electrode ( 5 ), and, related to the pair of electrodes, an isolator protrusion having a special coating. The invention provides an improved, more durable sensor structure, which withstands wear caused by overload situations better than earlier structures.
公开/授权文献
- EP1599736A1 CAPACITIVE ACCELERATION SENSOR 公开/授权日:2005-11-30
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