发明公开
EP1631982A1 PROCEDE D OBTENTION D UNE COUCHE TRES MINCE PAR AMINCISSEMENT PAR AUTO-PORTAGE PROVOQUE
有权
一种用于生产薄层BY非常挑起SELBSTRAGUNG
- 专利标题: PROCEDE D OBTENTION D UNE COUCHE TRES MINCE PAR AMINCISSEMENT PAR AUTO-PORTAGE PROVOQUE
- 专利标题(英): Method for production of a very thin layer with thinning by means of induced self-support
- 专利标题(中): 一种用于生产薄层BY非常挑起SELBSTRAGUNG
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申请号: EP04742879.2申请日: 2004-06-03
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公开(公告)号: EP1631982A1公开(公告)日: 2006-03-08
- 发明人: MORICEAU, Hubert , LAGAHE, Chrystelle , BATAILLOU, Benoit
- 申请人: COMMISSARIAT A L'ENERGIE ATOMIQUE
- 申请人地址: 31-33, rue de la Fédération 75752 Paris Cédex 15 FR
- 专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE
- 当前专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE
- 当前专利权人地址: 31-33, rue de la Fédération 75752 Paris Cédex 15 FR
- 代理机构: Poulin, Gérard
- 优先权: FR0350207 20030606
- 国际公布: WO2004112125 20041223
- 主分类号: H01L21/762
- IPC分类号: H01L21/762 ; H01L21/20
摘要:
The invention relates to a method for production of a thin layer of a first material on a substrate of a second material, called the final substrate, comprising the following steps: fixing a thin layer of a first material to the final substrate along an interface, implanting gaseous materials in the thin layer of the first material to generate a defining fragile zone, between the fragile zone and the interface of said thin layer, depositing a third layer on the thin layer of a first material, called the self-support layer and fracturing, within the structure comprising the final substrate, the thin layer of first material and the layer of third material at the fragile zone to provide the substrate supporting the thin layer.
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