发明公开
EP1633675A1 METHOD FOR PRODUCING HIGHLY PURE SOLUTIONS USING GASEOUS HYDROGEN FLUORIDE
审中-公开
使用气态氟化氢生产高纯溶液的方法
- 专利标题： METHOD FOR PRODUCING HIGHLY PURE SOLUTIONS USING GASEOUS HYDROGEN FLUORIDE
- 专利标题（中）： 使用气态氟化氢生产高纯溶液的方法
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申请号： EP04754501.7申请日： 2004-06-04
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公开(公告)号： EP1633675A1公开(公告)日： 2006-03-15
- 发明人: DODD, Michael, A. , SIEVERT, Wolfgang , MCFARLAND, John
- 申请人： Honeywell International Inc.
- 申请人地址： 101 Columbia Road, P.O. Box 2245 Morristown, New Jersey 07960 US
- 专利权人： Honeywell International Inc.
- 当前专利权人： Honeywell International Inc.
- 当前专利权人地址： 101 Columbia Road, P.O. Box 2245 Morristown, New Jersey 07960 US
- 代理机构： Hucker, Charlotte Jane
- 优先权： US455067 20030605
- 国际公布： WO2004108592 20041216
- 主分类号： C01B7/19
- IPC分类号： C01B7/19 ; C01B9/08 ; C01C1/16 ; C09K13/08 ; H01L21/306
摘要：
Methods for producing highly pure solutions containing hydrogen fluoride, one or more salts thereof or a mixture of two or more thereof, by adding hydrogen fluoride to at least one anhydrous solvent, wherein the hydrogen fluoride is added to the anhydrous solvent or solvents in the form of a gas or as a liquefied gas or as a mixture of gas and liquefied gas. High purity hydrogen fluoride and ammonium fluoride solutions produced by the inventive method are also disclosed.
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