发明公开
- 专利标题: PIEZOELECTRIC TUBES
- 专利标题(中): PIEZOELEKTRISCHERÖHREN
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申请号: EP04710575申请日: 2004-02-12
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公开(公告)号: EP1639657A4公开(公告)日: 2006-08-30
- 发明人: MA JAN , BOEY YIN CHIANG
- 申请人: UNIV NANYANG
- 专利权人: UNIV NANYANG
- 当前专利权人: UNIV NANYANG
- 优先权: US61140103 2003-07-01
- 主分类号: H01L41/087
- IPC分类号: H01L41/087 ; C23C2/04 ; C23C26/02 ; C25D13/02 ; C25D13/20 ; H01L41/09 ; H01L41/24
摘要:
The present invention relates to a method of forming piezoelectric tubes. The method includes forming a suspension of ceramic particles in a fluid medium,positioning a rod in the fluid and then depositing particles on the rod using electrophoresis. The deposited layer is then heat treated to form a piezoelectric tube.
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