发明公开
EP1675924A1 CHEMICAL-MECHANICAL POLISHING (CMP) SLURRY AND METHOD OF PLANARIZING COMPUTER MEMORY DISK SURFACES
审中-公开
泥浆用于计算机存储板表面上的化学机械抛光(CMP)平坦化和方法
- 专利标题: CHEMICAL-MECHANICAL POLISHING (CMP) SLURRY AND METHOD OF PLANARIZING COMPUTER MEMORY DISK SURFACES
- 专利标题(中): 泥浆用于计算机存储板表面上的化学机械抛光(CMP)平坦化和方法
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申请号: EP04785128.2申请日: 2004-09-28
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公开(公告)号: EP1675924A1公开(公告)日: 2006-07-05
- 发明人: FANG, Mingming , IANIRO, Michael, R. , EISENHOUR, Don
- 申请人: AMCOL INTERNATIONAL CORPORATION
- 申请人地址: One North Arlington, 1500 West Shore Drive Arlington Heights, Illinois 60004 US
- 专利权人: AMCOL INTERNATIONAL CORPORATION
- 当前专利权人: AMCOL INTERNATIONAL CORPORATION
- 当前专利权人地址: One North Arlington, 1500 West Shore Drive Arlington Heights, Illinois 60004 US
- 代理机构: UEXKÜLL & STOLBERG
- 优先权: US677433 20031002; US713709 20031114
- 国际公布: WO2005035677 20050421
- 主分类号: C09G1/02
- IPC分类号: C09G1/02 ; C09K3/14 ; H01L21/321 ; H01L21/304
摘要:
Compositions and methods for planarizing or polishing a NiP, glass, ceramic or glass-ceramic surface in the manufacture of a computer memory disk. The polishing compositions described herein comprise (a) a liquid carrier, preferably water; (b) an abrasive; (c) purified clay; and optional additives, such as (d) a chemical accelerator or oxidizing agent; and (e) a complexing or coupling agent capable of chemically or ionically complexing with, or coupling to, the NiP, glass, ceramic, and/or glass-ceramic material removed during the polishing process. The complexing or coupling agent carries away the metal, glass, ceramic and/or glass-ceramic particles removed during polishing, to prevent the separated particles from returning to the surface from which they were removed. Also disclosed are methods of planarizing or polishing a NiP, glass, ceramic and/or glass-ceramic surface comprising contacting the surface with the compositions.
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