发明公开
EP1723676A4 NANO-ENABLED MEMORY DEVICES AND ANISOTROPIC CHARGE CARRYING ARRAYS
审中-公开
纳米能力和各向异性货物承运阵列内存块
- 专利标题: NANO-ENABLED MEMORY DEVICES AND ANISOTROPIC CHARGE CARRYING ARRAYS
- 专利标题(中): 纳米能力和各向异性货物承运阵列内存块
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申请号: EP05758741申请日: 2005-03-09
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公开(公告)号: EP1723676A4公开(公告)日: 2009-04-15
- 发明人: DUAN XIANGFENG , CHOW CALVIN Y H , HEALD DAVID L , NIU CHUNMING , PARCE J WALLACE , STUMBO DAVID P
- 申请人: NANOSYS INC
- 专利权人: NANOSYS INC
- 当前专利权人: NANOSYS INC
- 优先权: US79641304 2004-03-10; US96297204 2004-10-12; US1857204 2004-12-21
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; G03G5/00 ; G03G5/02 ; G03G5/04 ; G03G5/043 ; G03G5/08 ; G03G5/082 ; G11C11/56 ; G11C13/02 ; H01L29/423 ; H01L29/788
摘要:
Methods and apparatuses for nanoenabled memory devices and anisotropic charge carrying arrays are described. In an aspect, a memory device includes a substrate, a source region of the substrate, and a drain region of the substrate. A population of nanoelements is deposited on the substrate above a channel region, the population of nanolements in one embodiment including metal quantum dots. A tunnel dielectric layer is formed on the substrate overlying the channel region, and a metal migration barrier layer is deposited over the dielectric layer. A gate contact is formed over the thin film of nanoelements. The nanoelements allow for reduced lateral charge transfer. The memory device may be a single or multistate memory device. In a multistate memory device which comprises one or more quantum dots or molecules having a plurality of discrete energy levels, a method is disclosed for charging and/or discharging the device which comprises filling each of the plurality of discrete energy levels of each dot or molecule with one or more electrons, and subsequently removing individual electrons at a time from each discrete energy level of the one or more dots or molecules.
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