发明公开
- 专利标题: ELECTROMECHANICAL ELECTRON TRANSFER DEVICES
- 专利标题(中): 电子机械电子转运设施
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申请号: EP05724461.8申请日: 2005-03-04
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公开(公告)号: EP1743381A2公开(公告)日: 2007-01-17
- 发明人: SCHEIBLE, Dominik V. , BLICK, Robert H.
- 申请人: WISCONSIN ALUMNI RESEARCH FOUNDATION
- 申请人地址: Post Office Box 7365 Madison, WI 53707-7365 US
- 专利权人: WISCONSIN ALUMNI RESEARCH FOUNDATION
- 当前专利权人: WISCONSIN ALUMNI RESEARCH FOUNDATION
- 当前专利权人地址: Post Office Box 7365 Madison, WI 53707-7365 US
- 代理机构: Roberts, Mark Peter
- 优先权: US833344 20040427
- 国际公布: WO2005109520 20051117
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
An electron transfer device is implemented in a structure which is readily capable of achieving charge transfer cycle frequencies in the range of several hundred MHz or more and which can be formed by conventional semiconductor integrated circuit manufacturing processes. The device includes a substrate having a horizontal extent and a pillar on the substrate extending from the substrate vertically with respect to the horizontal extent of the substrate. The pillar is formed to vibrate laterally with respect to the vertical length of the pillar at a resonant frequency which can be several hundred MHz. Drain and source electrodes extend from the substrate vertically with respect to the horizontal extent of the substrate, and have innermost ends on opposite sides of the pillar. The pillar is free to vibrate laterally back and forth between the innermost ends of the drain and source electrodes to transfer charge between the electrodes.
公开/授权文献
- EP1743381B1 ELECTROMECHANICAL ELECTRON TRANSFER DEVICES 公开/授权日:2009-04-29
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