Invention Publication
EP1760792A1 Nanodot memory and fabrication method thereof
审中-公开
Nanopunkt-Speicher und Verfahren zu dessen Herstellung
- Patent Title: Nanodot memory and fabrication method thereof
- Patent Title (中): Nanopunkt-Speicher und Verfahren zu dessen Herstellung
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Application No.: EP06119075.7Application Date: 2006-08-17
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Publication No.: EP1760792A1Publication Date: 2007-03-07
- Inventor: Seol, Kwang Soo , Cho, Kyung Sang , Kim, Byung Ki , Lee, Eun Hye , Choi, Jae Young
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: 416 Maetan-Dong, Yeongtong-gu Suwon-si Gyeonggi-do KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: 416 Maetan-Dong, Yeongtong-gu Suwon-si Gyeonggi-do KR
- Agency: Greene, Simon Kenneth
- Priority: KR20050081790 20050902
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L21/8247
Abstract:
Disclosed are a nanodot memory formed by applying a metal nanodot colloid solution, which is in a colloidal state, on a semiconductor substrate and thus uniformly arranging nanodot particles with a size of several nanometers on the semiconductor substrate in order to increase the integrity of the memory, and a fabrication method thereof. In the nanodot memory fabrication method, a first insulating film is formed on a surface of a substrate, and a metal nanodot colloid solution is applied on the first insulating film. Subsequently, a solvent inside the metal nanodot colloid solution is evaporated to form a nanodot particles layer, and a second insulating film is formed on the substrate, on the surface of which the nanodot particles are exposed. At this time, the nanodot particles are formed in a monolayer structure by adjusting concentration of metal nanodot particles contained within the metal nanodot colloid solution. By applying a metal nanodot colloid solution on a semiconductor substrate by means of a spin coating method to form monolayer nanodot particles with uniform arrangement, a nanodot memory having a nanodot structure can be easily fabricated.
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