发明公开
EP1782432A1 TIP STRUCTURE FOR SCANNING DEVICES, METHOD OF ITS PREPARATION AND DEVICES THEREON 审中-公开
上部结构为扫描仪,用于生产的事实和机构

TIP STRUCTURE FOR SCANNING DEVICES, METHOD OF ITS PREPARATION AND DEVICES THEREON
摘要:
The design of a probe and an instrument on its basis suggested in the present invention solve near-field optical microscopy and near-field infrared microscopy problems. Also the new method of probe manufacture suggested in this invention allows one to considerably reduce the cost of the final product and, thus, considerably increase the number of its possible users. The probe design suggested in this invention and the instrument based on these probes allow one to optically record and read the information and also to perform lithography works, in particular, the works with exposure of a photoresist at a nanometer resolution.
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