发明公开
EP1806828A1 LINEAR MOTOR, STAGE APPARATUS AND EXPOSURE APPARATUS
审中-公开
LINEARMOTOR，BÜHNENVORRICHTUNGUND BELICHTUNGSVORRICHTUNG
- 专利标题： LINEAR MOTOR, STAGE APPARATUS AND EXPOSURE APPARATUS
- 专利标题（中）： LINEARMOTOR，BÜHNENVORRICHTUNGUND BELICHTUNGSVORRICHTUNG
-
申请号： EP05787500.7申请日： 2005-09-30
-
公开(公告)号： EP1806828A1公开(公告)日： 2007-07-11
- 发明人: Morimoto, Shigeru, Nikon Corporation , Kominami, Tadahiro, Nikon Corporation
- 申请人： NIKON CORPORATION
- 申请人地址： Fuji Building, 2-3 Marunouchi 3-chome, Chiyoda-ku Tokyo 100-8831 JP
- 专利权人： NIKON CORPORATION
- 当前专利权人： NIKON CORPORATION
- 当前专利权人地址： Fuji Building, 2-3 Marunouchi 3-chome, Chiyoda-ku Tokyo 100-8831 JP
- 代理机构： Hooiveld, Arjen Jan Winfried
- 优先权： JP2004289924 20041001
- 国际公布： WO2006038563 20060413
- 主分类号： H02K41/02
- IPC分类号： H02K41/02 ; G03F7/20 ; H01L21/027 ; H02K3/24 ; H02K3/30 ; H02K3/32 ; H02K9/19
摘要：
A linear motor with high heat recovery efficiency that inhibits the rise in surface temperature is offered. The linear motor is disposed in a surrounding member (142) and facing a flow passage (142a) of a liquid for regulating temperature, and is provided with a coil unit (141) having at least a part thereof in contact with the liquid. The coil unit (141) is provided with a coil body (144), a mold layer (143) that covers the coil body and holds it in specific form, and a liquid protection layer (150) that covers the mold layer (143) and has liquid protection properties.
信息查询
