发明授权
- 专利标题: AVALANCHE PHOTODIODE
- 专利标题(中): 雪崩光电二极管
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申请号: EP04792925.2申请日: 2004-10-25
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公开(公告)号: EP1811578B1公开(公告)日: 2016-12-21
- 发明人: YAGYU, Eiji, Mitsubishi Denki Kabushiki Kaisha , ISHIMURA, Eitaro, Mitsubishi Denki K. K. , NAKAJI, Masaharu, Mitsubishi Denki K. K.
- 申请人: MITSUBISHI DENKI KABUSHIKI KAISHA
- 申请人地址: 7-3, Marunouchi 2-chome Chiyoda-ku, Tokyo 100-8310 JP
- 专利权人: MITSUBISHI DENKI KABUSHIKI KAISHA
- 当前专利权人: MITSUBISHI DENKI KABUSHIKI KAISHA
- 当前专利权人地址: 7-3, Marunouchi 2-chome Chiyoda-ku, Tokyo 100-8310 JP
- 代理机构: Popp, Eugen
- 国际公布: WO2006046276 20060504
- 主分类号: H01L31/107
- IPC分类号: H01L31/107 ; H01L31/0352
摘要:
In an avalanche photodiode provided with a substrate including a first electrode and a first semiconductor layer, formed of a first conductivity type, which is connected to the first electrode, the configuration is in such a way that, at least an avalanche multiplication layer, a light absorption layer, and a second semiconductor layer having a bandgap that is larger than that of the light absorption layer are layered on the substrate; a second conductivity type conductive region is formed in the second semiconductor layer; and the second conductivity type conductive region is arranged so as to be connected to a second electrode. With the foregoing configuration, an avalanche photodiode having a small dark current and a high long-term reliability can be provided with a simple process. Additionally, the configuration is in such a way that, by removing at least the light absorption layer among the layers which are layered on the peripheral portion, of the substrate, on which the second conductivity type conductive region and the second semiconductor layer around the second conductivity type conductive region are surrounded by that layers, a side face of the light absorption layer is formed. With the configuration, the dark current can be further reduced.
公开/授权文献
- EP1811578A1 AVALANCHE PHOTODIODE 公开/授权日:2007-07-25
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