发明公开
- 专利标题： Piezoelectric thin-film resonator and filter using the same
- 专利标题（中）： 压电薄膜谐振器和滤波器，这种谐振器
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申请号： EP07106869.6申请日： 2007-04-24
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公开(公告)号： EP1850478A3公开(公告)日： 2009-12-02
- 发明人: Iwaki, Masafumi , Tsutsumi, Jun , Nishihara, Tokihiro , Yokoyama, Tsuyoshi , Sakashita, Takeshi , Taniguchi, Shinji , Ueda, Masanori , Endo, Go
- 申请人： Fujitsu Media Devices Limited , Fujitsu Ltd.
- 申请人地址： 3-12, Shin-Yokohama 2-chome, Kohoku-ku Yokohama-shi, Kanagawa 222-0033 JP
- 专利权人： Fujitsu Media Devices Limited,Fujitsu Ltd.
- 当前专利权人： Fujitsu Media Devices Limited,Fujitsu Ltd.
- 当前专利权人地址： 3-12, Shin-Yokohama 2-chome, Kohoku-ku Yokohama-shi, Kanagawa 222-0033 JP
- 代理机构： Wilding, Frances Ward
- 优先权： JP2006127017 20060428
- 主分类号： H03H9/17
- IPC分类号： H03H9/17 ; H03H9/02
摘要：
A piezoelectric thin-film resonator includes a substrate (10), a lower electrode (12) provided on the substrate (10), a piezoelectric film (14) provided on the lower electrode (12), and an upper electrode (16) provided on the piezoelectric film (14) so as to have a portion that overlaps the lower electrode (12) across the piezoelectric film (14). At least a part of an outer end of the piezoelectric film (14) is further in than an outer end of an opposing region in which the upper and lower electrodes overlap each other across the piezoelectric film (14).
公开/授权文献
- EP1850478B1 Piezoelectric thin-film resonator and filter using the same 公开/授权日：2012-04-11
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