发明公开
EP1851574A1 OPTICAL SYSTEM, IN PARTICULAR OBJECTIVE OR ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS 审中-公开
光学系统包括镜头或照明系统,一种用于曝光微光刻投影

  • 专利标题: OPTICAL SYSTEM, IN PARTICULAR OBJECTIVE OR ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
  • 专利标题(中): 光学系统包括镜头或照明系统,一种用于曝光微光刻投影
  • 申请号: EP06708459.0
    申请日: 2006-02-22
  • 公开(公告)号: EP1851574A1
    公开(公告)日: 2007-11-07
  • 发明人: TOTZECK, MichaelKRÄHMER, DanielGRUNER, Toralf
  • 申请人: Carl Zeiss SMT AG
  • 申请人地址: Carl-Zeiss-Strasse 22 73446 Oberkochen DE
  • 专利权人: Carl Zeiss SMT AG
  • 当前专利权人: Carl Zeiss SMT AG
  • 当前专利权人地址: Carl-Zeiss-Strasse 22 73446 Oberkochen DE
  • 代理机构: Frank, Hartmut
  • 优先权: US656272P 20050225
  • 国际公布: WO2006089919 20060831
  • 主分类号: G02B5/30
  • IPC分类号: G02B5/30 G03F7/20
OPTICAL SYSTEM, IN PARTICULAR OBJECTIVE OR ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
摘要:
The invention relates to an optical system, in particular an objective or an illumination system for a microlithographic projection exposure apparatus, which in particular also permits the use of crystal materials with a high refractive index while reducing the influence of intrinsic birefringence on the imaging properties. In particular the invention relates to an optical system having at least two lens groups (10-60) with lenses of intrinsically birefringent material, wherein the lens groups (10-60) respectively comprise a first subgroup with lenses in a (lOO)-orientation and a second subgroup with lenses in (lll)-orientation, and wherein the lenses of each subgroup are arranged rotated relative to each other about their lens axes.
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