发明公开
- 专利标题： SUBSTRATE FOR CARRYING METHOD FOR COMPREHENSIVELY ACTING WITH MATERIALS, METHOD FOR PRODUCING SAID SUBSTRATE, METHOD FOR PRODUCING A MATERIAL ON A SUBSTRATE AND A DEVICE FOR OPERATING THEREWITH
- 专利标题（中）： 基板实施程序与对提供全面的材料，方法用于制造这种基板制造方法材料上使用为了基板和法处理
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申请号： EP06716844.3申请日： 2006-01-20
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公开(公告)号： EP1855098A1公开(公告)日： 2007-11-14
- 发明人: Givargizov, Mikhail Evgenievich
- 申请人： Givargizov, Mikhail Evgenievich
- 申请人地址： ul. Akademika Vargi, 1-115 Moscow, 117133 RU
- 专利权人： Givargizov, Mikhail Evgenievich
- 当前专利权人： Givargizov, Mikhail Evgenievich
- 当前专利权人地址： ul. Akademika Vargi, 1-115 Moscow, 117133 RU
- 代理机构： Einsel, Martin
- 优先权： RU2005101370 20050121
- 国际公布： WO2006078194 20060727
- 主分类号： G01N1/28
- IPC分类号： G01N1/28 ; G01N1/36
摘要：
The invention relates to the structural design of a substrate for specimens, to a method for the production thereof and to a device based thereon. The inventive substrate structural design makes it possible to carry out a method for comprehensively investigating thin films consisting in forming a thin-film specimen on a specifically constructed specimen table, which enables to prepare such a specimen and to carry out subsequent operations for the investigation thereof. In particular for investigating a given specimen, said method makes it possible to use devices such as optical, atomic-force and optical near field microscopes, an analyser based on an X-rayogram obtainable by means of a synchrotron radiation, transmission and scanning (raster) electron microscopes, etc., thereby making it possible to identify the concrete investigated specimen areas while the transfer thereof from one device to another one
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