发明公开
- 专利标题： IMAGE ENHANCEMENT TECHNIQUE
- 专利标题（中）： 图像改进技术
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申请号： EP05738056.0申请日： 2005-04-15
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公开(公告)号： EP1896901A1公开(公告)日： 2008-03-12
- 发明人: LJUNGBLAD, Ulric
- 申请人： MICRONIC LASER SYSTEMS AB
- 申请人地址： IPR & Legal Department, Nytorpsvägen 9 S-183 03 Täby SE
- 专利权人： MICRONIC LASER SYSTEMS AB
- 当前专利权人： MICRONIC LASER SYSTEMS AB
- 当前专利权人地址： IPR & Legal Department, Nytorpsvägen 9 S-183 03 Täby SE
- 国际公布： WO2006110070 20061019
- 主分类号： G03F7/20
- IPC分类号： G03F7/20
摘要：
The present invention relates to a method to improve at least one feature edge steepness in an image to be exposed onto a moving workpiece, comprising the actions of: moving the image in essentially the same direction relative to the direction of movement of the workpiece, synchronizing said moving of the image with a pulse length of an exposure radiation source. The invention also relates to a pattern generator for creating patterns on a workpiece
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