利索-全球专利检索

  1. 登录
  2. 注册
发明公开
EP1901426A1 Resonator, apparatus having the same and fabrication method of resonator 审中-公开
Resorator，Vorrichtung damit und Herstellungsverfahrenfürden Resonator

Resonator, apparatus having the same and fabrication method of resonator
摘要：
A resonator (100) includes a substrate (110), and a resonating unit (135) formed on the substrate, and having a lower electrode (140), a piezoelectric film (150), and an upper electrode (160). The lower electrode is formed of at least two layers (141,142) to adjust a piezoelectric coupling coefficient. The lower electrode includes a first electrode layer and a second electrode layer, which have crystallographic characteristics, particularly, grain sizes or surface roughnesses Ra, different from each other, respectively. The first and the second electrode layers are formed to have a predetermined thickness ratio to each other.
摘要（中）：

谐振器（100）包括基板（110）和形成在基板上的并具有下电极（140），压电膜（150）和上电极（160）的谐振单元（135）。 下电极由至少两层（141,142）形成，以调节压电耦合系数。 下电极包括分别具有彼此不同的晶体学特性，特别是晶粒尺寸或表面粗糙度Ra的第一电极层和第二电极层。 第一电极层和第二电极层形成为具有彼此预定的厚度比。

信息查询
Global Dossier Espacenet
0/0