发明公开
- 专利标题: SUBSTRATE TRANSPORT APPARATUS
- 专利标题(中): SUBSTRATTRANSPORTVORRICHTUNG
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申请号: EP06774600.8申请日: 2006-07-07
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公开(公告)号: EP1907173A1公开(公告)日: 2008-04-09
- 发明人: GILCHRIST, Ulysses , HOFMEISTER, Christofer
- 申请人: Brooks Automation, Inc.
- 申请人地址: 15 Elizabeth Drive Chelmsford, MA 01824 US
- 专利权人: Brooks Automation, Inc.
- 当前专利权人: Brooks Automation, Inc.
- 当前专利权人地址: 15 Elizabeth Drive Chelmsford, MA 01824 US
- 代理机构: Schmit, Christian Norbert Marie
- 优先权: US178830 20050711
- 国际公布: WO2007008797 20070118
- 主分类号: B25J9/06
- IPC分类号: B25J9/06
摘要:
A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.
公开/授权文献
- EP1907173B1 SUBSTRATE TRANSPORT APPARATUS 公开/授权日:2012-10-03
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