发明公开
- 专利标题: PROCEDE DE FABRICATION D UN DISPOSITIF ELECTRONIQUE FLEXIBLE DU TYPE ECRAN COMPORTANT UNE PLURALITE DE COMPOSANTS EN COUCHES MINCES
- 专利标题(英): Process for fabricating a flexible electronic device of the screen type, including a plurality of thin-film components
- 专利标题(中): 用于生产对画面类型,一些薄膜含有组分的柔性电子器件
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申请号: EP06831137.2申请日: 2006-11-20
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公开(公告)号: EP1952441A1公开(公告)日: 2008-08-06
- 发明人: TEMPLIER, François , MORICEAU, Hubert , MOUREY, Bruno , DI CIOCCIO, Léa
- 申请人: COMMISSARIAT A L'ENERGIE ATOMIQUE
- 申请人地址: 25, rue Leblanc Immeuble "Le Ponant D" 75015 Paris FR
- 专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE
- 当前专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE
- 当前专利权人地址: 25, rue Leblanc Immeuble "Le Ponant D" 75015 Paris FR
- 代理机构: Quantin, Bruno Marie Henri
- 优先权: FR0511798 20051122
- 国际公布: WO2007060314 20070531
- 主分类号: H01L27/13
- IPC分类号: H01L27/13 ; H01L21/786 ; H01L21/84
摘要:
To fabricate a thin-film flexible electronic device of the screen type, comprising a plurality of thin-film components on a glass support: a starting support is prepared, comprising a rigid bulk substrate (32) and a glass sheet (31) fastened to this rigid bulk substrate by reversible direct bonding so as to obtain a removable interface (33); the plurality of thin-film components (41-49) is fabricated on this glass sheet; the glass sheet on which the plurality of thin-film components has been fabricated is separated, from the rigid bulk substrate, by disassembling the interface (33); and, advantageously, this glass sheet and the plurality of thin-film components is transferred to a final support.
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