发明公开
- 专利标题: APPARATUS FOR COOLING
- 专利标题(中): 用于冷却的设备
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申请号: EP06851960.2申请日: 2006-11-16
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公开(公告)号: EP1969424A2公开(公告)日: 2008-09-17
- 发明人: HOL, Sven Antoin Johan , DE KLERK, Angelo Cesar Peter , LOOPSTRA, Erik, Roelof , Kuijperlaan 6 , SCHOLTEN, Mark
- 申请人: ASML Netherlands B.V.
- 申请人地址: De Run 6501 5504 DR Veldhoven NL
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: De Run 6501 5504 DR Veldhoven NL
- 代理机构: Seitz, Holger Fritz Karl
- 优先权: US281901 20051118
- 国际公布: WO2008072031 20080619
- 主分类号: G03F
- IPC分类号: G03F20060101
摘要:
A cooling apparatus is disclosed that has a first cooling structure (220), in thermal contact with a heat source (210) having a temperature greater than a cool structure (250), comprising a channel through which a cooling fluid is passed, an isolator (230) between the heat source and the cool structure, the isolator in thermal contact with the first cooling structure and comprising a material of low thermal conductivity, and a second cooling (240) structure between the isolator and the cool structure, the second cooling structure comprising a channel through which cooling fluid is passed.
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