发明授权
- 专利标题: Integration of automated cryopump safety purge
- 专利标题(中): 整合自动低温泵安全清洗
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申请号: EP08075586.1申请日: 2004-06-09
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公开(公告)号: EP1980748B1公开(公告)日: 2011-04-20
- 发明人: Amundsen, Paul E , Buonpane, Maureen , Andrews, Doug , Jacobs, Jordan
- 申请人: Brooks Automation, Inc.
- 申请人地址: 15 Elizabeth Drive Chelmsford, MA 01824 US
- 专利权人: Brooks Automation, Inc.
- 当前专利权人: Brooks Automation, Inc.
- 当前专利权人地址: 15 Elizabeth Drive Chelmsford, MA 01824 US
- 代理机构: Jenkins, Peter David
- 优先权: US608779 20030627; US608851 20030627; US608770 20030627
- 主分类号: F04B37/08
- IPC分类号: F04B37/08 ; F04B49/06
摘要:
An electronic controller is integral with a cryopump and provides an offline solution for purging a cryopump and an exhaust line during unsafe conditions. The electronic controller is responsible for controlling the opening and closing of purge, exhaust purge and gate valves coupled to the cryopump. The electronic controller can pre-empt any attempts from other systems to control these valves during unsafe conditions. An unsafe condition can be a power failure in the cryopump, a dangerous temperature in the cryopump or a temperature sensing diode that is not operating properly. When an unsafe condition is determined, the exhaust purge valve is opened and the gate valve closed, while the opening of a purge valve may be delayed for a safe period of time. If the unsafe condition still exists when the safe period of time elapses, the purge valve is allowed to open. A fail-safe purge valve release and time delay mechanism can be used to ensure that the purge valve opens after the period of time elapses. Electrochemical capacitors may be used to store an amount of energy to hold a normally open purge valve closed for a safe period of time. When this energy is discharged and the unsafe condition still exists, the purge valve can automatically open.
公开/授权文献
- EP1980748A1 Integration of automated cryopump safety purge 公开/授权日:2008-10-15
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