发明公开
- 专利标题： ANTIREFLECTIVE COATING MATERIAL
- 专利标题（中）： 抗反射涂层材料
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申请号： EP06847526.8申请日： 2006-12-07
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公开(公告)号： EP1989593A2公开(公告)日： 2008-11-12
- 发明人: FU, Peng-fei , MOYER, Eric, Scott
- 申请人： Dow Corning Corporation
- 申请人地址： 2200 West Salzburg Road Midland, Michigan 48686-0994 US
- 专利权人： Dow Corning Corporation
- 当前专利权人： Dow Corning Corporation
- 当前专利权人地址： 2200 West Salzburg Road Midland, Michigan 48686-0994 US
- 代理机构： Bailey, Lindsey
- 优先权： US772619P 20060213
- 国际公布： WO2007094848 20070823
- 主分类号： G03F7/075
- IPC分类号： G03F7/075
摘要：
Antireflective coatings comprising (i) a silsesquioxane resin having the formula (PhSiO (3-x) /2 (OH) x) mHSiO (3-x) /2 (OH) x) n (MeSiO (3-x) /2 (OH) x) p where Ph is a phenyl group, Me is a methyl group, x has a value of 0, 1 or 2; m has a value of 0.01 to 0.99, n has a value of 0.01 to 0.99, p has a value of 0.01 to 0.99, and m + n + p = 1; (ii) a polyethylene oxide fluid; and (iii) a solvent; and a method of forming said antireflective coatings on an electronique device.
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