发明公开
EP1990611A1 ELECTRET CAPACITOR TYPE COMPOSITE SENSOR
审中-公开
ELEKTRETKONDENSATOR-ARTIGER VERBUNDSENSOR
- 专利标题: ELECTRET CAPACITOR TYPE COMPOSITE SENSOR
- 专利标题(中): ELEKTRETKONDENSATOR-ARTIGER VERBUNDSENSOR
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申请号: EP07737538.4申请日: 2007-02-28
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公开(公告)号: EP1990611A1公开(公告)日: 2008-11-12
- 发明人: SAWADA, Tatsuhiro c/o Matsushita Electric Ind. Co.,Ltd
- 申请人: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 申请人地址: 1006, Oaza Kadoma, Kadoma-shi, Osaka 571-8501 JP
- 专利权人: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 当前专利权人: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 当前专利权人地址: 1006, Oaza Kadoma, Kadoma-shi, Osaka 571-8501 JP
- 代理机构: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
- 优先权: JP2006053129 20060228
- 国际公布: WO2007100015 20070907
- 主分类号: G01D21/02
- IPC分类号: G01D21/02 ; G01H11/06 ; H04R19/01
摘要:
To provide a small, thin and light-weighted composite sensor which can also detect light together with sound, vibration, pressure or acceleration by a single sensor.
An electret capacitor type composite sensor is constituted by a casing 11, an electrode 12, a hole portion (which is a sound hole and also a light introduction hole) 22, a spacer 31, a vibration plate 41 having light transmissibility, a vibration plate ring 42, a printed board 6 and a semiconductor element 61. Further, a photoelectric conversion portion having a function of photoelectric effect is provided at a portion of the surface of the semiconductor element 61, light is conducted to the photoelectric conversion portion via the hole portion 22 and the vibration plate 41 having light transmissibility, and an electric signal generated by the photoelectromotive force is taken out independently from an electric signal generated by the change of the electrostatic capacitance of the electret capacitor.
An electret capacitor type composite sensor is constituted by a casing 11, an electrode 12, a hole portion (which is a sound hole and also a light introduction hole) 22, a spacer 31, a vibration plate 41 having light transmissibility, a vibration plate ring 42, a printed board 6 and a semiconductor element 61. Further, a photoelectric conversion portion having a function of photoelectric effect is provided at a portion of the surface of the semiconductor element 61, light is conducted to the photoelectric conversion portion via the hole portion 22 and the vibration plate 41 having light transmissibility, and an electric signal generated by the photoelectromotive force is taken out independently from an electric signal generated by the change of the electrostatic capacitance of the electret capacitor.
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