发明公开
EP2027601A2 METHOD AND APPARATUS FOR EXTRACTING IONS FROM AN ION SOURCE FOR USE IN ION IMPLANTATION
审中-公开
方法和设备从离子源用以进行离子注入离子提取
- 专利标题： METHOD AND APPARATUS FOR EXTRACTING IONS FROM AN ION SOURCE FOR USE IN ION IMPLANTATION
- 专利标题（中）： 方法和设备从离子源用以进行离子注入离子提取
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申请号： EP07798405.2申请日： 2007-06-12
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公开(公告)号： EP2027601A2公开(公告)日： 2009-02-25
- 发明人: HORSKY, Thomas, N. , MILGATE, Robert, W. , SACCO, George, P. , KRULL, Wade, Allen
- 申请人： Semequip, Inc.
- 申请人地址： 34 Sullivan Road, North Billerica, Massachusetts, 01862-2000 US
- 专利权人： Semequip, Inc.
- 当前专利权人： Semequip, Inc.
- 当前专利权人地址： 34 Sullivan Road, North Billerica, Massachusetts, 01862-2000 US
- 代理机构： Paustian, Othmar
- 优先权： US452003 20060612
- 国际公布： WO2007149727 20071227
- 主分类号： H01L27/00
- IPC分类号： H01L27/00
摘要：
Thermal control is provided for an extraction electrode of an ion-beam producing system that prevents formation of deposits and unstable operation and enables use with ions produced from condensable vapors and with ion sources capable of cold and hot operation. Electrical heating of the extraction electrode is employed for extracting decaborane or octadecaborane ions. Active cooling during use with a hot ion source prevents electrode destruction, permitting the extraction electrode to be of heat-conductive and fluorine-resistant aluminum composition.
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