A measurement processing block obtains a plurality of first images of the object to be measured, taken with very small movements in the imaging area. A feature extraction processing block extracts an approximate feature portion of the object from the first images obtained by the measurement processing block. A partial-image creation processing block creates a plurality of first partial images by grouping the plurality of first images obtained by the measurement processing block in the vicinity of the approximate feature portion extracted by the feature extraction processing block. A super-resolution-image creation processing block creates a super-resolution image from the plurality of first partial images created by the partial-image creation processing block. Thus, detailed features of the object are measured precisely and easily even when the object is located far away.