发明授权
- 专利标题: VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG EINES BILDES
- 专利标题(英): Method and device for producing an image
- 专利标题(中): 方法和装置用于生成图像
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申请号: EP07726124.6申请日: 2007-06-22
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公开(公告)号: EP2041771B1公开(公告)日: 2012-02-01
- 发明人: SELLMAIR, Josef
- 申请人: Carl Zeiss NTS GmbH
- 申请人地址: Carl-Zeiss-Strasse 56 73447 Oberkochen DE
- 专利权人: Carl Zeiss NTS GmbH
- 当前专利权人: Carl Zeiss NTS GmbH
- 当前专利权人地址: Carl-Zeiss-Strasse 56 73447 Oberkochen DE
- 代理机构: Tongbhoyai, Martin
- 优先权: DE102006031643 20060706; DE102006040308 20060829
- 国际公布: WO2008003405 20080110
- 主分类号: H01J37/26
- IPC分类号: H01J37/26
摘要:
The invention relates to a method and to a device (1) for producing an image of an object (5) by means of a particle beam. According to the method and in the device (1), the particle beam is scanned by the object (5). The aim of the invention is to provide a method and a device for producing an image of an object (5) by means of a particle beam that can be used with a cold field emitter (2) in such a manner that a good image quality is constantly ensured. Said aim is achieved by virtue of the fact that, according to the invention, when a radiation parameter is altered, the object (5) is rescanned preferably with the corrected parameter. The inventive device (1) comprises the corresponding means (4, 6, 7) therefor.
公开/授权文献
- EP2041771A2 VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG EINES BILDES 公开/授权日:2009-04-01
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