发明授权
EP2041771B1 VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG EINES BILDES 有权
方法和装置用于生成图像

  • 专利标题: VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG EINES BILDES
  • 专利标题(英): Method and device for producing an image
  • 专利标题(中): 方法和装置用于生成图像
  • 申请号: EP07726124.6
    申请日: 2007-06-22
  • 公开(公告)号: EP2041771B1
    公开(公告)日: 2012-02-01
  • 发明人: SELLMAIR, Josef
  • 申请人: Carl Zeiss NTS GmbH
  • 申请人地址: Carl-Zeiss-Strasse 56 73447 Oberkochen DE
  • 专利权人: Carl Zeiss NTS GmbH
  • 当前专利权人: Carl Zeiss NTS GmbH
  • 当前专利权人地址: Carl-Zeiss-Strasse 56 73447 Oberkochen DE
  • 代理机构: Tongbhoyai, Martin
  • 优先权: DE102006031643 20060706; DE102006040308 20060829
  • 国际公布: WO2008003405 20080110
  • 主分类号: H01J37/26
  • IPC分类号: H01J37/26
VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG EINES BILDES
摘要:
The invention relates to a method and to a device (1) for producing an image of an object (5) by means of a particle beam. According to the method and in the device (1), the particle beam is scanned by the object (5). The aim of the invention is to provide a method and a device for producing an image of an object (5) by means of a particle beam that can be used with a cold field emitter (2) in such a manner that a good image quality is constantly ensured. Said aim is achieved by virtue of the fact that, according to the invention, when a radiation parameter is altered, the object (5) is rescanned preferably with the corrected parameter. The inventive device (1) comprises the corresponding means (4, 6, 7) therefor.
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