发明公开
- 专利标题: Frequency-stabilized laser device, laser frequency stabilizing method, and laser frequency stabilizing program
- 专利标题(中): 激光加速器激光加工
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申请号: EP08168484.7申请日: 2008-11-06
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公开(公告)号: EP2058907A1公开(公告)日: 2009-05-13
- 发明人: Oozeki, Hidekazu
- 申请人: Mitutoyo Corporation
- 申请人地址: 20-1, Sakado 1-chome, Takatsu-ku Kawasaki-shi, Kanagawa 213-8533 JP
- 专利权人: Mitutoyo Corporation
- 当前专利权人: Mitutoyo Corporation
- 当前专利权人地址: 20-1, Sakado 1-chome, Takatsu-ku Kawasaki-shi, Kanagawa 213-8533 JP
- 代理机构: Skone James, Robert Edmund
- 优先权: JP2007288052 20071106
- 主分类号: H01S3/04
- IPC分类号: H01S3/04 ; H01S3/139
摘要:
A frequency-stabilized laser device comprises an actuator (25) arranged to vary the cavity length; an actuator driver (44) arranged to apply a voltage to the actuator for changing displacement; a temperature detector (51) arranged to detect the temperature (53) on the cavity; a temperature adjuster arranged to heat or cool the cavity; a cavity temperature controller (54) arranged to control the temperature adjuster based on a previously given instruction temperature and the temperature on the cavity detected at the temperature detector; and an instruction temperature corrector arranged to correct the instruction temperature given to the cavity temperature controller such that the voltage applied to the actuator remains almost constant.
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