发明授权
- 专利标题: CERAMIC SUBSTRATE MANUFACTURING METHOD AND CERAMIC SUBSTRATE
- 专利标题(中): 法生产陶瓷基板与陶瓷基板
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申请号: EP07806757.6申请日: 2007-09-05
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公开(公告)号: EP2061290B1公开(公告)日: 2011-10-12
- 发明人: YAMAMOTO, Yasuyuki , SUGAWARA, Ken , MAEDA, Masakatsu
- 申请人: Tokuyama Corporation
- 申请人地址: 1-1 Mikage-cho Shunan-shi, Yamaguchi-ken 745-8648 JP
- 专利权人: Tokuyama Corporation
- 当前专利权人: Tokuyama Corporation
- 当前专利权人地址: 1-1 Mikage-cho Shunan-shi, Yamaguchi-ken 745-8648 JP
- 代理机构: Smart, Peter John
- 优先权: JP2006241393 20060906
- 国际公布: WO2008029847 20080313
- 主分类号: H05K3/28
- IPC分类号: H05K3/28 ; H05K3/40 ; H01L23/12 ; H05K3/46
摘要:
A method for manufacturing a ceramic substrate having a via hole and a surface wiring pattern to which the via hole is electrically connected. The method comprises a step of preparing a sintered ceramic substrate having a via hole, a step of forming a sintered ceramic layer having a hole or an opening portion whose bottom is constituted of at least part of the exposed end surface of the via hole on the sintered ceramic substrate by the post-fire method, a step of forming a conductive portion electrically connecting the surface of the sintered ceramic layer and the via hole in the hole or opening portion, and a step of forming a surface wiring pattern electrically connecting to the conductive portion on the surface of the sintered ceramic layer. With this, even if a sintered ceramic substrate is manufactured by the co-fire method, the position of the connection between the via hole and the surface wiring pattern can be controlled with high precision, any problem such as short-circuit is not caused, and a fine wiring pattern with high precision can be formed on a ceramic substrate.
公开/授权文献
- EP2061290A1 CERAMIC SUBSTRATE MANUFACTURING METHOD AND CERAMIC SUBSTRATE 公开/授权日:2009-05-20
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