发明授权
- 专利标题: Piezoelectric/electrostrictive ceramics and process for producing the same
- 专利标题(中): 压电/电致陶瓷和它们的制备方法
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申请号: EP09250226.9申请日: 2009-01-28
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公开(公告)号: EP2086030B1公开(公告)日: 2013-04-10
- 发明人: Kashiwaya, Toshikatsu , Ebigase, Takashi
- 申请人: NGK Insulators, Ltd.
- 申请人地址: 2-56, Suda-cho, Mizuho-ku Nagoya-shi, Aichi 467-8530 JP
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: 2-56, Suda-cho, Mizuho-ku Nagoya-shi, Aichi 467-8530 JP
- 代理机构: Naylor, Matthew John
- 优先权: JP2008019076 20080130
- 主分类号: H01L41/187
- IPC分类号: H01L41/187 ; H01L41/43 ; C04B35/499 ; C01G33/00 ; C01G53/00 ; C04B35/493 ; C04B35/628 ; C04B35/626
摘要:
Piezoelectric/electrostrictive ceramics are provided, which exhibit only a small change in properties after polarization, high insulating properties, and narrow variations in durability. A piezoelectric/electrostrictive element (1) has a laminated structure in which an electrode film (110), a piezoelectric/electrostrictive film (112), another electrode film (114), another piezoelectric/electrostrictive film (116), and another electrode film (118) are laminated in order of mention on a thin portion (104) of a substrate (102). The piezoelectric/electrostrictive films (112, 116) are ceramic films that include a perovskite oxide containing lead as an A-site component and magnesium, nickel, niobium, titanium, and zirconium as B-site components. Crystal grains in the piezoelectric/electrostrictive films (112, 116) have a core/shell structure with the shell portion having a higher concentration of nickel than the core portion and with the core portion having a higher concentration of magnesium than the shell portion. Such piezoelectric/electrostrictive films (112, 116) can be formed by firing a piezoelectric/electrostrictive material powder synthesized from a columbite compound.
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