发明公开
EP2087838A1 Metallization process to obtain a microelectrode on a photopatternable substrate and its biomedical application on an organ transplant monitoring device 审中-公开
用于获得可光图案化基板上的装置的微电极和其生物医学应用器官移植的监测金属化工艺

Metallization process to obtain a microelectrode on a photopatternable substrate and its biomedical application on an organ transplant monitoring device
摘要:
Metallization process to obtain a microelectrode on a photopatternable polymeric substrate comprising the steps of depositing a material with low adhesion, spin coating a negative photoresin A, Patterning its design, protecting its uncured areas, depositing a positive photoresin B, and etch away them, Patterning the electrode using photolithography, metallizing the resulting surface, Etching away the positive photoresin polymers B and B', spin-coating a negative photoresin A and finally performing the final development, hence overcoming the state of the art difficulties providing a process for obtaining a photopatterned polymeric substrate microelectrode, with the ductility required to prevent the microelectrode from breaking and the thickness required to avoid folding during the insertion.
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