发明公开
EP2095409A1 INTERCONNECT STRUCTURE HAVING ENHANCED ELECTROMIGRATION RELIABILITY AND A METHOD OF FABRICATING SAME
审中-公开
具有产生改进的电荷迁移可靠性和过程连接结构
- 专利标题: INTERCONNECT STRUCTURE HAVING ENHANCED ELECTROMIGRATION RELIABILITY AND A METHOD OF FABRICATING SAME
- 专利标题(中): 具有产生改进的电荷迁移可靠性和过程连接结构
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申请号: EP07842115.3申请日: 2007-09-10
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公开(公告)号: EP2095409A1公开(公告)日: 2009-09-02
- 发明人: YANG, Chih-Chao , WANG, Ping-Chuan , WANG, Yun-Yu
- 申请人: International Business Machines Corporation
- 申请人地址: New Orchard Road Armonk, NY 10504 US
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: New Orchard Road Armonk, NY 10504 US
- 代理机构: Waldner, Philip
- 优先权: US560044 20061115
- 国际公布: WO2008060745 20080522
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
An interconnect structure having improved electromigration (EM) reliability is provided. The inventive interconnect structure avoids a circuit dead opening that is caused by EM failure by incorporating a EM preventing liner (66) at least partially within a metal interconnect. In one embodiment, a 'U-shaped' EM preventing liner (66) is provided that abuts a diffusion barrier that separates conductive material (64, 68) from the dielectric material (54B). In another embodiment, a space is located between the 'U-shaped' EM preventing liner and the diffusion barrier. In yet another embodiment, a horizontal EM liner that abuts the diffusion barrier is provided. In yet a further embodiment, a space exists between the horizontal EM liner and the diffusion barrier.
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