发明公开
EP2095409A1 INTERCONNECT STRUCTURE HAVING ENHANCED ELECTROMIGRATION RELIABILITY AND A METHOD OF FABRICATING SAME 审中-公开
具有产生改进的电荷迁移可靠性和过程连接结构

INTERCONNECT STRUCTURE HAVING ENHANCED ELECTROMIGRATION RELIABILITY AND A METHOD OF FABRICATING SAME
摘要:
An interconnect structure having improved electromigration (EM) reliability is provided. The inventive interconnect structure avoids a circuit dead opening that is caused by EM failure by incorporating a EM preventing liner (66) at least partially within a metal interconnect. In one embodiment, a 'U-shaped' EM preventing liner (66) is provided that abuts a diffusion barrier that separates conductive material (64, 68) from the dielectric material (54B). In another embodiment, a space is located between the 'U-shaped' EM preventing liner and the diffusion barrier. In yet another embodiment, a horizontal EM liner that abuts the diffusion barrier is provided. In yet a further embodiment, a space exists between the horizontal EM liner and the diffusion barrier.
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