发明公开
EP2096678A4 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
审中-公开
半导体部件及其制造方法的半导体元件,
- 专利标题: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- 专利标题(中): 半导体部件及其制造方法的半导体元件,
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申请号: EP07850921申请日: 2007-12-19
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公开(公告)号: EP2096678A4公开(公告)日: 2010-06-30
- 发明人: OHMI TADAHIRO , SUGITANI KOICHI , KOIKE TADASHI , BAMBA AKINORI , KOBAYASHI AKIHIRO , WATANUKI KOHEI
- 申请人: NAT UNIVERSITY CORP TOHOKU UNV , ZEON CORP , UBE NITTO KASEI CO , UBE INDUSTRIES
- 专利权人: NAT UNIVERSITY CORP TOHOKU UNV,ZEON CORP,UBE NITTO KASEI CO,UBE INDUSTRIES
- 当前专利权人: NAT UNIVERSITY CORP TOHOKU UNV,ZEON CORP,UBE NITTO KASEI CO,UBE INDUSTRIES
- 优先权: JP2006344404 2006-12-21
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L21/336
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