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发明公开
EP2101412A1 Variable filter element, variable filter module and fabrication method thereof 审中-公开
变量过滤器，Bauteil mit variablem过滤器和Herstellungsverfahrendafür

Variable filter element, variable filter module and fabrication method thereof
摘要：
A variable filter element and a variable filter module suitable for decreasing the drive voltage are provided. The variable filter element includes a substrate, two ground lines and a signal line between the ground lines, where these lines are disposed to extend in parallel on the substrate. The filter element further includes movable capacitor electrodes which bridge between the ground lines and have portions facing the signal line, drive electrodes which are located between the signal line and the ground lines and generate electrostatic attraction with the movable capacitor electrodes, and a ground line, which is disposed in the substrate, has a portion facing the signal line, and is electrically connected with the ground. The variable capacitor electrodes and the ground line constitute ground interconnection portions, and the signal line and ground interconnection portion constitute a distributed constant transmission line.
摘要（中）：

提供了适于降低驱动电压的可变滤波器元件和可变滤波器模块。 可变滤波器元件包括衬底，两条接地线和接地线之间的信号线，其中这些线被设置成在衬底上平行延伸。 滤波器元件还包括桥接在接地线之间并具有面向信号线的部分的可移动电容器电极，位于信号线和接地线之间的驱动电极，并且与可移动电容器电极产生静电吸引，并且接地线， 其设置在基板中，具有面向信号线的部分，并且与地面电连接。 可变电容电极和接地线构成接地互连部分，信号线和接地互连部分构成分布常数的传输线。

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