发明公开
- 专利标题: FLUID TRANSPORTATION DEVICE
- 专利标题(中): FLÜSSIGKEITSTRANSPORTVORRICHTUNG
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申请号: EP08720932.6申请日: 2008-02-27
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公开(公告)号: EP2123913A1公开(公告)日: 2009-11-25
- 发明人: KAMITANI, Gaku , HIRATA, Atsuhiko
- 申请人: Murata Manufacturing Co. Ltd.
- 申请人地址: 10-1, Higashikotari 1-chome Nagaokakyo-shi Kyoto 617-8555 JP
- 专利权人: Murata Manufacturing Co. Ltd.
- 当前专利权人: Murata Manufacturing Co. Ltd.
- 当前专利权人地址: 10-1, Higashikotari 1-chome Nagaokakyo-shi Kyoto 617-8555 JP
- 代理机构: Reeve, Nicholas Edward
- 优先权: JP2007061703 20070312
- 国际公布: WO2008111397 20080918
- 主分类号: F04B43/04
- IPC分类号: F04B43/04 ; F04B45/047 ; H01L41/09
摘要:
[Object] To provide a fluid conveyance device having a simple and compact structure and conveying efficiently a fluid.
[Solving Means] A fluid conveyance device includes a substrate 10, and a disk-like piezoelectric element 20 arranged in a bendable fashion on the substrate. A plurality of circular concentric segment electrodes 23a-23e are formed on the piezoelectric element 20, and are provided with voltages E1-E4 with phases thereof shifted. A ring wavy deformation is thus caused on the piezoelectric element 20. A ring pocket caused between the piezoelectric element 20 and the substrate 10 is moved in a radial direction, conveying a fluid from an outer circular portion to a central portion and discharging the fluid from the central portion.
[Solving Means] A fluid conveyance device includes a substrate 10, and a disk-like piezoelectric element 20 arranged in a bendable fashion on the substrate. A plurality of circular concentric segment electrodes 23a-23e are formed on the piezoelectric element 20, and are provided with voltages E1-E4 with phases thereof shifted. A ring wavy deformation is thus caused on the piezoelectric element 20. A ring pocket caused between the piezoelectric element 20 and the substrate 10 is moved in a radial direction, conveying a fluid from an outer circular portion to a central portion and discharging the fluid from the central portion.
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