发明公开
EP2123913A1 FLUID TRANSPORTATION DEVICE 审中-公开
FLÜSSIGKEITSTRANSPORTVORRICHTUNG

FLUID TRANSPORTATION DEVICE
摘要:
[Object] To provide a fluid conveyance device having a simple and compact structure and conveying efficiently a fluid.
[Solving Means] A fluid conveyance device includes a substrate 10, and a disk-like piezoelectric element 20 arranged in a bendable fashion on the substrate. A plurality of circular concentric segment electrodes 23a-23e are formed on the piezoelectric element 20, and are provided with voltages E1-E4 with phases thereof shifted. A ring wavy deformation is thus caused on the piezoelectric element 20. A ring pocket caused between the piezoelectric element 20 and the substrate 10 is moved in a radial direction, conveying a fluid from an outer circular portion to a central portion and discharging the fluid from the central portion.
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