发明授权
EP2130237B1 POSITIONIERSYSTEM FÜR EINEN MIKROSTELLTISCH 有权
定位为微LOCK TABLE

  • 专利标题: POSITIONIERSYSTEM FÜR EINEN MIKROSTELLTISCH
  • 专利标题(英): Positioning system for a microstage
  • 专利标题(中): 定位为微LOCK TABLE
  • 申请号: EP08801117.6
    申请日: 2008-07-28
  • 公开(公告)号: EP2130237B1
    公开(公告)日: 2010-10-20
  • 发明人: BROMME, Alexander
  • 申请人: Feinmess Dresden GmbH
  • 申请人地址: Fritz-Schreiter-Str. 32 01259 Dresden DE
  • 专利权人: Feinmess Dresden GmbH
  • 当前专利权人: Feinmess Dresden GmbH
  • 当前专利权人地址: Fritz-Schreiter-Str. 32 01259 Dresden DE
  • 代理机构: Pätzelt, Peter
  • 优先权: DE102007035346 20070727
  • 国际公布: WO2009015660 20090205
  • 主分类号: H01L41/09
  • IPC分类号: H01L41/09
POSITIONIERSYSTEM FÜR EINEN MIKROSTELLTISCH
摘要:
The invention relates to a positioning system for a microstage, having a DC actuating motor (6) which is coupled to the microstage by means of a threaded spindle (4) and a spindle nut (3). That end of the threaded spindle (4) which is situated opposite the DC actuating motor (6) is provided with a rotary piezo motor (11) which is coupled to the threaded spindle (4) by means of a permanently electromagnetic clutch (10). The DC actuating motor for large actuating paths and the rotary piezo motor for actuating paths in the nanometer range act on the same threaded spindle. When the positioning system is used, the microstage is moved into a technologically predetermined position by the DC actuating motor by means of the ball screw and the permanently electromagnetic clutch is activated in such a way that the rotary piezo motor is directly coupled to the threaded spindle, while the DC actuating motor is uncoupled from the threaded spindle.
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