Invention Grant
- Patent Title: SCANNING TYPE CONFOCAL MICROSCOPE
- Patent Title (中): KONFOKALES RASTERMIKROSKOP
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Application No.: EP08791374.5Application Date: 2008-07-15
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Publication No.: EP2169442B1Publication Date: 2015-10-28
- Inventor: SUZUKI, Fumio , AIKAWA, Naoshi , YAMAGUCHI, Kotaro
- Applicant: Nikon Corporation
- Applicant Address: 15-3, Konan 2-chome Minato-ku Tokyo 108-6290 JP
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: 15-3, Konan 2-chome Minato-ku Tokyo 108-6290 JP
- Agency: Petzold, Silke
- Priority: JP2007187816 20070719; JP2007296678 20071115
- International Announcement: WO2009011441 20090122
- Main IPC: G02B21/00
- IPC: G02B21/00 ; G02B27/00
Abstract:
A confocal scanning microscope including: an objective system (second objective lens 23 and objective lens 24) illuminating a sample SA with illumination light; a scanning mechanism 31 scanning the sample SA to obtain an intensity signal; and a scanning optical system 32 provided between the scanning mechanism and the objective system. The scanning optical system composed of, in order from the scanning mechanism side, a first positive lens group G1, a second negative lens group G2, and a third positive lens group G3. The third lens group has two chromatic aberration correction portions each formed by a positive lens and a negative lens or negative lens and positive lens. Glass materials are selected such that one performs chromatization and the other performs achromatization, thereby providing a confocal scanning microscope capable of correcting lateral chromatic aberration generated in the objective system in the specific wavelength region by the scanning optical system.
Public/Granted literature
- EP2169442A1 SCANNING TYPE CONFOCAL MICROSCOPE Public/Granted day:2010-03-31
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