发明公开
- 专利标题: METHOD AND APPARATUS FOR APPLYING A MATERIAL ON A SUBSTRATE
- 专利标题(中): 方法和装置将材料应用上的衬底
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申请号: EP08779036.6申请日: 2008-07-16
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公开(公告)号: EP2171119A1公开(公告)日: 2010-04-07
- 发明人: HOUBEN, René Jos , OOSTERHUIS, Gerrit
- 申请人: Nederlandse Organisatie voor Toegepast- Natuurwetenschappelijk Onderzoek TNO
- 申请人地址: Schoemakerstraat 97 2628 VK The Hague NL
- 专利权人: Nederlandse Organisatie voor Toegepast- Natuurwetenschappelijk Onderzoek TNO
- 当前专利权人: Nederlandse Organisatie voor Toegepast- Natuurwetenschappelijk Onderzoek TNO
- 当前专利权人地址: Schoemakerstraat 97 2628 VK The Hague NL
- 代理机构: Hatzmann, Martin
- 优先权: EP07112576 20070716; EP07114232 20070813
- 国际公布: WO2009011583 20090122
- 主分类号: C23C4/12
- IPC分类号: C23C4/12 ; C23C18/08 ; C23C18/14 ; B05D7/24 ; B05B17/06
摘要:
The invention provides a method for applying a material onto a substrate using a droplet printing technique wherein a gas stream is released into the direction of a substrate, which gas stream comprises a carrier gas and droplets of a suspension of the material or droplets of a solution of a precursor of the material or droplets of a precursor of the material as such, whereby the droplets in the gas stream are first maintained in a steady flow and subsequently in a converging flow before the droplets are contacted with the substrate. The invention further provides an apparatus for carrying out said method.
公开/授权文献
- EP2171119B1 METHOD AND APPARATUS FOR APPLYING A MATERIAL ON A SUBSTRATE 公开/授权日:2019-04-10
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