A waveguide coupling probe(10) for sending light into an optical waveguide on a substrate or for receiving light from an optical waveguide on a substrate is provided, the waveguide coupling probe comprisingan optical element (11) for guiding the light in a propagation direction, the optical element (11) having a facet (15) where the light enters or exits the optical element (11) and means for coupling the light between the optical element (11) and the waveguide. A waveguide coupling probe (10) according to the present invention is characterized in that the light coupling means are formed on the facet (15) and comprise a diffraction structure (14). In a preferred embodiment the optical element (11) may be an optical fiber and the diffraction structure (14) may be a strong diffraction structure, e.g. a metal grating structure.When bringing the waveguide coupling probe (10) in the vicinity of a waveguide on a substrate, the light that is guided by the waveguide may be diffracted into the optical element (11). Alternatively, light from the optical element (11) may be coupled into the waveguide. When using the waveguide coupling probe (10) for coupling light between the optical element (11) and a waveguide, the waveguide coupling probe may be positioned out of the plane of the waveguide. Furthermore a method is provided for forming an opticalstructure, e.g. a metal grating structure, on a facet (15) of an optical element (11).