发明公开
EP2267528A3 Pellicle frame and lithographic pellicle 审中-公开
薄膜框架和光刻薄膜

Pellicle frame and lithographic pellicle
摘要:
A pellicle frame is provided that includes a pellicle frame bar having a cross-section with a shape that has at least one triangular recess in at least one side edge of a quadrilateral having an upper edge and a lower edge parallel to each other and a cross-sectional area of no greater than 20 mm 2 . There is also provided a lithographic pellicle that includes a pellicle film stretched over one end face of the pellicle frame via a pellicle film adhesive, and that includes an exposure master plate adhesive on the other end face.
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