发明公开
- 专利标题: Processing method for a workpiece
- 专利标题(中): 一种用于处理工件的方法
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申请号: EP10168734.1申请日: 2010-07-07
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公开(公告)号: EP2272628A3公开(公告)日: 2014-02-19
- 发明人: Numata, Atsushi
- 申请人: Canon Kabushiki Kaisha
- 申请人地址: 30-2 Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 JP
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: 30-2 Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 JP
- 代理机构: TBK
- 优先权: JP2009163752 20090710
- 主分类号: B24B49/00
- IPC分类号: B24B49/00 ; B23Q15/013 ; B23K15/00 ; C03C19/00 ; C23F4/00 ; G01B11/00 ; B24C1/08
摘要:
Provided is a processing method capable of accurately grasping a removal rate and coping with processing of an optical device or an optical device molding die, for which high shape accuracy is required. An ion beam as a tool is caused to scan a workpiece as a dummy work, and a dwell time of the tool at this time is changed based on a linear function with respect to a scanning position thereof and a removal rate with respect to the continuously changed dwell time is grasped based on an actually formed removal shape. The dwell time of the tool is changed based on the linear function with respect to the scanning position, and hence a removal rate based on the actual removal shape can be acquired continuously from a case where a scanning speed is fast to a case where the scanning speed is slow.
公开/授权文献
- EP2272628B1 Processing method for a workpiece 公开/授权日:2015-05-13
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