发明公开
- 专利标题： An image forming method and apparatus
- 专利标题（中）： Bilderzeugungsverfahren und -vorrichtung
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申请号： EP10175836.5申请日： 2003-02-13
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公开(公告)号： EP2290445A2公开(公告)日： 2011-03-02
- 发明人: Sandström, Torbjörn
- 申请人： Micronic Mydata AB
- 申请人地址： Box 3141 183 03 Täby SE
- 专利权人： Micronic Mydata AB
- 当前专利权人： Micronic Mydata AB
- 当前专利权人地址： Box 3141 183 03 Täby SE
- 优先权： SE0200547 20020225
- 主分类号： G03F7/20
- IPC分类号： G03F7/20
摘要：
The present invention relates to an apparatus for forming a pattern on a radiation sensitive material comprising a source to form a radiation beam, a scanning element to scan at least one beam from said radiation source over said radiation sensitive material, a modulator to modulate said at least one beam during scanning according to an input pattern data file, where said modulation of the beam creates a coherent sub-image on the workpiece and several sub-images are non-coherently superposed to create a final image. The invention also relates to a method of patterning a workpiece and a workpiece as such.
公开/授权文献
- EP2290445A3 An image forming method and apparatus 公开/授权日：2012-06-06
信息查询
IPC分类:
