发明公开
- 专利标题: ULTRAVIOLET LIGHT RECEIVING ELEMENT AND METHOD FOR MEASURING AMOUNT OF ULTRAVIOLET LIGHT
- 专利标题(中): 紫外线接收元件和测量紫外线量的方法
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申请号: EP09802990.3申请日: 2009-07-29
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公开(公告)号: EP2312644A1公开(公告)日: 2011-04-20
- 发明人: ONO, Shingo , KAWAGUCHI, Noriaki , FUKUDA, Kentaro , SUYAMA, Toshihisa
- 申请人: National University Corporation Nagoya Institute of Technology , Tokuyama Corporation
- 申请人地址: 29, Aza Kiichi Gokiso-cho Showa-ku Nagoya-shi Aichi 466-0061 JP
- 专利权人: National University Corporation Nagoya Institute of Technology,Tokuyama Corporation
- 当前专利权人: National University Corporation Nagoya Institute of Technology,Tokuyama Corporation
- 当前专利权人地址: 29, Aza Kiichi Gokiso-cho Showa-ku Nagoya-shi Aichi 466-0061 JP
- 代理机构: Duckworth, Timothy John
- 优先权: JP2008195618 20080730
- 国际公布: WO2010013748 20100204
- 主分类号: H01L31/0264
- IPC分类号: H01L31/0264 ; G01J1/02
摘要:
[Problems to be Solved] To provide a novel ultraviolet light receiving element which is selectively sensitive to ultraviolet radiation, and a method for measuring the dose of ultraviolet radiation using the ultraviolet light receiving element. [Means to Solve the Problems] An ultraviolet detecting layer composed of a thin film of a metal fluoride, such as cerium fluoride, lithium fluoride, magnesium fluoride or calcium fluoride, is formed on a substrate of silica glass, sapphire or the like. Further, at least a pair of an anode and a cathode are formed on the ultraviolet detecting layer to prepare an ultraviolet light receiving element. This ultraviolet light receiving element changes in electric resistivity in accordance with the dose of incident ultraviolet radiation. Thus, the dose of ultraviolet radiation can be measured by taking out and measuring the change as an electric signal.
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