发明公开
EP2325676A1 PATTERN-FORMING MEMBER AND METHOD OF MANUFACTURING THE SAME
审中-公开
STREKTURBILDENDES ELEMENT UND HERSTELLUNGSVERFAHRENDAFÜR
- 专利标题: PATTERN-FORMING MEMBER AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): STREKTURBILDENDES ELEMENT UND HERSTELLUNGSVERFAHRENDAFÜR
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申请号: EP09809447.7申请日: 2009-06-03
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公开(公告)号: EP2325676A1公开(公告)日: 2011-05-25
- 发明人: USAMI, Yoshihisa
- 申请人: FUJIFILM Corporation
- 申请人地址: 26-30, Nishiazabu 2-chome Minato-ku Tokyo 106-8620 JP
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: 26-30, Nishiazabu 2-chome Minato-ku Tokyo 106-8620 JP
- 代理机构: Klunker . Schmitt-Nilson . Hirsch
- 优先权: JP2008221900 20080829
- 国际公布: WO2010023789 20100304
- 主分类号: G02B1/11
- IPC分类号: G02B1/11 ; G03F7/20 ; H01L33/00 ; B23K26/00 ; B23K26/36
摘要:
There are provided a patterned member which has densely arranged pits on the surface and which is easily manufactured, and a method for manufacturing such a patterned member. A patterned member includes a substrate 10, a thermally deformable heat mode photoresist layer 20 provided on the substrate 10, pits 21 formed on the photoresist layer 20. The pits 21 are arranged in line along a plurality of tracks which are substantially parallel to one another, and as viewed in a direction along which the tracks Tn extend, each pit 21 on one track is positioned at a position corresponding to a midpoint between two adjacent pits arranged on an adjacent track.
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