发明公开
EP2325676A1 PATTERN-FORMING MEMBER AND METHOD OF MANUFACTURING THE SAME 审中-公开
STREKTURBILDENDES ELEMENT UND HERSTELLUNGSVERFAHRENDAFÜR

PATTERN-FORMING MEMBER AND METHOD OF MANUFACTURING THE SAME
摘要:
There are provided a patterned member which has densely arranged pits on the surface and which is easily manufactured, and a method for manufacturing such a patterned member. A patterned member includes a substrate 10, a thermally deformable heat mode photoresist layer 20 provided on the substrate 10, pits 21 formed on the photoresist layer 20. The pits 21 are arranged in line along a plurality of tracks which are substantially parallel to one another, and as viewed in a direction along which the tracks Tn extend, each pit 21 on one track is positioned at a position corresponding to a midpoint between two adjacent pits arranged on an adjacent track.
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