The invention relates to a method for irradiating a target with a beam moving to a target point, comprising the following steps: measuring at least one of the variables relating to the position of the beam and intensity of the beam, changing the beam as a function of the at least one measured variable, particularly as a function of a variance relating to the at least one measured variable. The method is characterized in that per target point, the at least one measured variable is measured no more than once. The invention further relates to a device for irradiating a target according to the claimed method and to a control system for controlling a device of said kind.