发明公开
EP2343749A3 Method of manufacturing high resolution organic thin film pattern
有权
一种用于生产具有高分辨率的有机薄膜的图案的方法
- 专利标题: Method of manufacturing high resolution organic thin film pattern
- 专利标题(中): 一种用于生产具有高分辨率的有机薄膜的图案的方法
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申请号: EP11250012.9申请日: 2011-01-07
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公开(公告)号: EP2343749A3公开(公告)日: 2014-04-02
- 发明人: Suh, Min-Chul , Lee, Sin-Doo , Choi, Won-Suk , Kim, Min-Hoi
- 申请人: Samsung Display Co., Ltd. , SNU R&DB Foundation
- 申请人地址: 95, Samsung 2 Ro Giheung-Gu Yongin-City, Gyeonggi-Do KR
- 专利权人: Samsung Display Co., Ltd.,SNU R&DB Foundation
- 当前专利权人: Samsung Display Co., Ltd.,SNU R&DB Foundation
- 当前专利权人地址: 95, Samsung 2 Ro Giheung-Gu Yongin-City, Gyeonggi-Do KR
- 代理机构: Mounteney, Simon James
- 优先权: KR20100002377 20100111
- 主分类号: H01L51/00
- IPC分类号: H01L51/00 ; H01L51/05
摘要:
A method of forming a high resolution organic thin film pattern, the method including forming a first organic layer (130) on a substrate (110); selectively removing the first organic layer by selectively irradiating light energy onto the first organic layer (130), and forming a remaining part of the first organic layer as a sacrifice layer (131); forming a second organic layer (150) on the substrate (110) and the entire surface of the sacrifice layer (131); and lifting off the second organic layer formed on the sacrifice layer (131) by removing the sacrifice layer using a solvent, and forming the remaining second organic layer as a second organic layer pattern (153).
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