发明公开
EP2343749A3 Method of manufacturing high resolution organic thin film pattern 有权
一种用于生产具有高分辨率的有机薄膜的图案的方法

Method of manufacturing high resolution organic thin film pattern
摘要:
A method of forming a high resolution organic thin film pattern, the method including forming a first organic layer (130) on a substrate (110); selectively removing the first organic layer by selectively irradiating light energy onto the first organic layer (130), and forming a remaining part of the first organic layer as a sacrifice layer (131); forming a second organic layer (150) on the substrate (110) and the entire surface of the sacrifice layer (131); and lifting off the second organic layer formed on the sacrifice layer (131) by removing the sacrifice layer using a solvent, and forming the remaining second organic layer as a second organic layer pattern (153).
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